Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2004-03-26
2009-10-13
Paik, Sang Y (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C392S416000, C118S724000
Reexamination Certificate
active
07601933
ABSTRACT:
A heat processing device that bakes a substrate having a resist coating film containing a volatile substance, includes a hot plate2, a hot plate temperature control unit3, a box member1a, 5, 32that defines a heat space30and a fluid space31, air supply unit18, 18A and suction unit10, 10A that create an air current flowing in a horizontal direction in the fluid space31, and a controller22, 22A that controls the hot plate temperature control unit3, the air supply unit18, 18A, suction unit10, 10A and the gas temperature control unit19so that a relationship of TF<TH≦TS≦TP is satisfied where TP represents a temperature of the hot plate, TS represents an upper surface temperature of the substrate W, TH represents a temperature of the heat space and TF represents a temperature of the fluid space.
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Kyouda Hideharu
Ookouchi Atsushi
Shizukuishi Momoko
Terashita Yuichi
Yoshihara Kousuke
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Paik Sang Y
Tokyo Electron Limited
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