Drying and gas or vapor contact with solids – Apparatus – With automatic control
Reexamination Certificate
2011-07-19
2011-07-19
Gravini, Stephen M. (Department: 3743)
Drying and gas or vapor contact with solids
Apparatus
With automatic control
C034S443000, C034S487000, C438S584000, C427S235000
Reexamination Certificate
active
07980003
ABSTRACT:
A heat processing apparatus includes a heating plate configured to heat the substrate; a cover configured to surround a space above the heating plate; an exhaust gas flow forming mechanism configured to exhaust gas inside the cover to form exhaust gas flows within the space above the heating plate; a downflow forming mechanism configured to form downflows uniformly supplied onto an upper surface of the substrate placed on the heating plate; and a control mechanism configured to execute mode switching control between a mode arranged to heat the substrate while forming the downflows by the downflow forming mechanism and a mode arranged to heat the substrate while forming the exhaust gas flows by the exhaust gas flow forming mechanism.
REFERENCES:
patent: 3491457 (1970-01-01), Hankin et al.
patent: 3918168 (1975-11-01), Saeman
patent: 3919968 (1975-11-01), Sandmann et al.
patent: 4022580 (1977-05-01), Rush
patent: 4143468 (1979-03-01), Novotny et al.
patent: 4327665 (1982-05-01), Arrasmith
patent: 4416624 (1983-11-01), Bloom
patent: 4455762 (1984-06-01), Saeman
patent: 4458428 (1984-07-01), Saeman
patent: 4640726 (1987-02-01), Sallee et al.
patent: 4728531 (1988-03-01), Matz et al.
patent: 4754769 (1988-07-01), Flynn
patent: 4785552 (1988-11-01), Best
patent: 4922277 (1990-05-01), Carlson et al.
patent: 4957432 (1990-09-01), Rachal et al.
patent: 5010659 (1991-04-01), Treleven
patent: 5083381 (1992-01-01), Aigo
patent: 5090134 (1992-02-01), Russemeyer et al.
patent: 5090898 (1992-02-01), Smith
patent: 5099586 (1992-03-01), Anderson
patent: 5105557 (1992-04-01), Vadasz et al.
patent: 5119570 (1992-06-01), Russemeyer et al.
patent: 5147690 (1992-09-01), Faust et al.
patent: 5174045 (1992-12-01), Thompson et al.
patent: 5177878 (1993-01-01), Visser
patent: 5205051 (1993-04-01), Hurwitt
patent: 5210959 (1993-05-01), Brestovansky et al.
patent: 5216820 (1993-06-01), Green et al.
patent: 5228206 (1993-07-01), Grant et al.
patent: 5237756 (1993-08-01), Hurwitt
patent: 5290381 (1994-03-01), Nozawa et al.
patent: 5307568 (1994-05-01), Matsuo et al.
patent: 5314574 (1994-05-01), Takahashi
patent: 5377708 (1995-01-01), Bergman et al.
patent: 5401316 (1995-03-01), Shiraishi et al.
patent: 5451524 (1995-09-01), Coble et al.
patent: 5489337 (1996-02-01), Nomura et al.
patent: 5551165 (1996-09-01), Turner et al.
patent: 5575079 (1996-11-01), Yokomizo et al.
patent: 5621982 (1997-04-01), Yamashita et al.
patent: 5671544 (1997-09-01), Yokomizo et al.
patent: 5715612 (1998-02-01), Schwenkler
patent: 5727332 (1998-03-01), Thrasher et al.
patent: 5735194 (1998-04-01), Cochran
patent: 5746008 (1998-05-01), Yamashita et al.
patent: 5749159 (1998-05-01), Schwenkler
patent: 5752532 (1998-05-01), Schwenkler
patent: 5821035 (1998-10-01), Hirano et al.
patent: 5879459 (1999-03-01), Gadgil et al.
patent: 5884412 (1999-03-01), Tietz et al.
patent: 5886326 (1999-03-01), Tang
patent: 5899001 (1999-05-01), Layton
patent: 5901462 (1999-05-01), Rudd
patent: 5903711 (1999-05-01), Okase
patent: 5908292 (1999-06-01), Smith et al.
patent: 5913981 (1999-06-01), Florez
patent: 5940985 (1999-08-01), Kamikawa et al.
patent: 5942035 (1999-08-01), Hasebe et al.
patent: 5943880 (1999-08-01), Tateyama
patent: 5956859 (1999-09-01), Matsumoto et al.
patent: 5960555 (1999-10-01), Deaton et al.
patent: 5962070 (1999-10-01), Mitsuhashi et al.
patent: 5985041 (1999-11-01), Florez
patent: 6029371 (2000-02-01), Kamikawa et al.
patent: 6067728 (2000-05-01), Farmer et al.
patent: 6072162 (2000-06-01), Ito et al.
patent: 6085437 (2000-07-01), Stipp
patent: 6095167 (2000-08-01), Florez
patent: 6122837 (2000-09-01), Olesen et al.
patent: 6129044 (2000-10-01), Zhao et al.
patent: 6156151 (2000-12-01), Komino et al.
patent: 6165277 (2000-12-01), Florez
patent: 6172337 (2001-01-01), Johnsgard et al.
patent: 6183563 (2001-02-01), Choi et al.
patent: 6192603 (2001-02-01), Seita
patent: 6212789 (2001-04-01), Kato et al.
patent: 6216364 (2001-04-01), Tanaka et al.
patent: 6241403 (2001-06-01), Sakamoto et al.
patent: 6256903 (2001-07-01), Rudd
patent: 6261007 (2001-07-01), Takamori et al.
patent: 6263590 (2001-07-01), Whigham et al.
patent: 6286524 (2001-09-01), Okuchi et al.
patent: 6308436 (2001-10-01), Stipp
patent: 6319322 (2001-11-01), Ueda et al.
patent: 6342691 (2002-01-01), Johnsgard et al.
patent: 6354832 (2002-03-01), Yoshimura et al.
patent: 6363624 (2002-04-01), Pang et al.
patent: 6370796 (2002-04-01), Zucker
patent: 6393719 (2002-05-01), Stipp
patent: 6399923 (2002-06-01), Kano et al.
patent: 6402844 (2002-06-01), Harada et al.
patent: 6412501 (2002-07-01), Onoda et al.
patent: 6425191 (2002-07-01), Kao et al.
patent: 6443641 (2002-09-01), Takamori et al.
patent: 6446355 (2002-09-01), Jones et al.
patent: 6458208 (2002-10-01), Anai et al.
patent: 6553689 (2003-04-01), Jain et al.
patent: 6564474 (2003-05-01), Nagashima
patent: 6579373 (2003-06-01), Moriyama
patent: 6607785 (2003-08-01), Timmons et al.
patent: 6615510 (2003-09-01), Jones et al.
patent: 6634805 (2003-10-01), Templeton et al.
patent: 6647642 (2003-11-01), Kamikawa et al.
patent: 6651357 (2003-11-01), Bria et al.
patent: 6655042 (2003-12-01), Yi et al.
patent: 6658764 (2003-12-01), Hsu
patent: 6665952 (2003-12-01), Nagashima
patent: 6681497 (2004-01-01), Bria et al.
patent: 6688020 (2004-02-01), Toshima et al.
patent: 6688784 (2004-02-01), Templeton
patent: 6709523 (2004-03-01), Toshima et al.
patent: 6713405 (2004-03-01), Moriyama
patent: 6725565 (2004-04-01), Harano et al.
patent: 6729041 (2004-05-01), Shindo et al.
patent: 6749655 (2004-06-01), Dautenhahn
patent: 6796054 (2004-09-01), Minami et al.
patent: 6830389 (2004-12-01), Templeton
patent: 6838643 (2005-01-01), Kobayashi et al.
patent: 6848198 (2005-02-01), Yamaguchi
patent: 6867153 (2005-03-01), Tokunaga
patent: 6872670 (2005-03-01), Toshima et al.
patent: 6877247 (2005-04-01), DeMoore
patent: 6920704 (2005-07-01), Silverbrook et al.
patent: 6944970 (2005-09-01), Silverbrook et al.
patent: 6959502 (2005-11-01), Nakamura et al.
patent: 6966949 (2005-11-01), Kobayashi et al.
patent: 6986214 (2006-01-01), Minami et al.
patent: 7024798 (2006-04-01), Minami et al.
patent: 7107701 (2006-09-01), Takemura et al.
patent: 7146744 (2006-12-01), Kobayashi
patent: 7268323 (2007-09-01), Tomobe et al.
patent: 7343698 (2008-03-01), Sugimoto et al.
patent: 7353623 (2008-04-01), Asuke
patent: 7357842 (2008-04-01), Ishikawa et al.
patent: 7367138 (2008-05-01), Sogard
patent: 7377053 (2008-05-01), Maeda et al.
patent: 7437834 (2008-10-01), Nakatsukasa et al.
patent: 7493705 (2009-02-01), Gomi
patent: 7513063 (2009-04-01), Sago et al.
patent: 7526879 (2009-05-01), Bae et al.
patent: 7644512 (2010-01-01), Liu et al.
patent: 7651306 (2010-01-01), Rice et al.
patent: 7665227 (2010-02-01), Wright et al.
patent: 7669530 (2010-03-01), Aylor et al.
patent: 7694647 (2010-04-01), Ishikawa et al.
patent: 7699021 (2010-04-01), Volfovski et al.
patent: 7743728 (2010-06-01), Ishikawa et al.
patent: 7745079 (2010-06-01), Coon
patent: 7797855 (2010-09-01), Fukuoka et al.
patent: 7798764 (2010-09-01), Rice et al.
patent: 7875864 (2011-01-01), Sogard
patent: 2001/0025431 (2001-10-01), Kitano et al.
patent: 2001/0032396 (2001-10-01), Toshima et al.
patent: 2002/0004994 (2002-01-01), Rudd
patent: 2002/0073576 (2002-06-01), Kamikawa et al.
patent: 2002/0092198 (2002-07-01), Bria et al.
patent: 2002/0095818 (2002-07-01), Jain et al.
patent: 2003/0000102 (2003-01-01), Jones et al.
patent: 2003/0015218 (2003-01-01), Bran
patent: 2003/0106239 (2003-06-01), Yi et al.
patent: 2003/0115770 (2003-06-01), Harano et al.
patent: 2003/0159307 (2003-08-01), Sago et al.
patent: 2003/0172542 (2003-09-01), Minami et al.
patent: 2003/0208922 (2003-11-01), Hsu
patent: 2003/0230003 (2003-12-01), Miller et al.
patent: 2004/0123490 (2004-07-01), Pancheri et al.
patent: 2004/0139626 (2004-07-01), Takemura et al.
patent: 2004/0187344 (2004-09-01), Yamaguchi
patent: 2004/0194340 (2004-10-01), Kobayashi
patent: 2004/0216324 (2004-11-01), Nakamura et al.
patent: 2004/0216325 (2004-11-01), Minami et al.
patent: 2005/0155248 (2005-07-01), Silverbrook et al.
patent: 2005/0155
Aoki Shigeki
Sakai Yuichi
Shinya Hiroshi
Yamashita Mitsuo
Gravini Stephen M.
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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