Heating – Heating apparatus element having protective cooling structure – Wall – floor or roof element
Reexamination Certificate
2006-06-12
2011-10-11
Wilson, Gregory A (Department: 3749)
Heating
Heating apparatus element having protective cooling structure
Wall, floor or roof element
C432S212000, C432S251000
Reexamination Certificate
active
08033823
ABSTRACT:
The present invention is a heat processing apparatus comprising: a processing vessel that receives a plurality of objects to be processed in a tier-like manner to subject the objects to be processed to a predetermined heating process; a tubular heater disposed to surround the processing vessel, the tubular heater being capable of heating the objects to be processed; an exhaust heat system for discharging an atmosphere in a space between the heater and the processing vessel; and a cooling unit that blows out a cooling fluid into the space to cool the processing vessel. The heater has a tubular heat insulating member, and a heating resistor arranged on an inner circumference of the heat insulating member. The cooling unit has a plurality of blowing nozzles embedded in the heat insulating member. Each of the blowing nozzles is formed in such a manner that an inlet orifice of the blowing nozzle and an outlet orifice thereof are not linearly aligned to each other.
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Kato Kazuhiko
Nakao Ken
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
Wilson Gregory A
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