Heat processing apparatus

Details Heat processing apparatus Heat processing apparatus

1995-04-11

1996-10-22

Bennett, Henry A.

Heating

Work feeding, agitating, discharging or conveying...

Removable furnace bottom section or kiln cart

432 5, 432152, 432239, 432245, F27D 312

Patent

active

055671527

ABSTRACT:
A heat processing apparatus for subjecting heat processing to a wafer by heating includes a reaction tube for containing the wafers, a heating element provided around the reaction tube, for heating an inside of the reaction tube, a plurality of heat radiating members provided concentrically around the heating element with an airtight space between the heating element and an innermost one of the heat radiating members and airtight spaces between the heat radiating members, and a pressure-reducing device for reducing the pressure of these airtight spaces. In this heat processing apparatus, the pressures of the airtight spaces are reduced by the pressure-reducing means at least when the temperature of the inside of the reaction tube is increased.

REFERENCES:
patent: 5000682 (1991-03-01), Heidt et al.

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