Heat process device

Electric heating – Heating devices – With heating unit structure

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Details

219468, 219390, H05B 326

Patent

active

052256634

ABSTRACT:
A heat process device according to the present invention includes a film-like heating body serving as a heat source for a heat transfer plate on which an object to be processed is mounted and heated. Therefore, the heat process device can be excellent in controlling the heating temperature. It can also apply a uniform heat process to the object. Further, it can be made small in size and easy to operate.

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