Heat-generating element, heat-generating substrates,...

Details Heat-generating element, heat-generating substrates,... Heat-generating element, heat-generating substrates,...

2006-01-24

2006-01-24

Walberg, Teresa J. (Department: 3753)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S543000

Reexamination Certificate

active

06989513

ABSTRACT:
A stable and durable heat-generating element and substrate, a method of efficient and highly precise manufacture of same, and equipment utilizing same are obtained. Employing as material a silicon substrate into at least a portion of which boron or another impurity is diffused to impart conductivity, a heater portion, in which are provided one or a plurality of slits the corner portions of which are removed or are rounded, is fabricated integrally on the silicon substrate by etching processes. Simultaneously with this, a depression portion provided below to control the heating state of the heater portion is formed integrally.

REFERENCES:
patent: 3441804 (1969-04-01), Klemmer
patent: 4478076 (1984-10-01), Bohrer
patent: 4624741 (1986-11-01), Daniele
patent: 5129983 (1992-07-01), Greiff
patent: 5380373 (1995-01-01), Kimura et al.
patent: 6323447 (2001-11-01), Kondoh et al.
patent: 6515404 (2003-02-01), Wong
patent: 2001/0048014 (2001-12-01), Ichikawa et al.
patent: 2004/0176732 (2004-09-01), Frazier et al.
patent: 2004/0178879 (2004-09-01), Mitra et al.
patent: 2004/0194628 (2004-10-01), Mitra
patent: 06-084604 (1994-03-01), None

Affiliated with

Also associated with

Rating

Heat-generating element, heat-generating substrates,... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Heat-generating element, heat-generating substrates,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Heat-generating element, heat-generating substrates,... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3526530