Refrigeration – Using electrical or magnetic effect – Thermoelectric; e.g. – peltier effect
Reexamination Certificate
2000-11-16
2003-09-09
Ford, John K. (Department: 3743)
Refrigeration
Using electrical or magnetic effect
Thermoelectric; e.g., peltier effect
C062S003200, C062S003300, C165S164000, C165S165000, C165S166000, C165S167000, C165S170000
Reexamination Certificate
active
06615590
ABSTRACT:
TECHNICAL FIELD
The present invention relates to a heat exchanger, which is utilized in a temperature control or the like for controlling temperature by cooling or heating a corrosive fluid (for example, a fluid such as a developing fluid and photo-resist or the like, which dislikes inflow of a metal ion), which flows through a flow path such as a pipe or if the like in a semiconductor related manufacturing apparatus or the like.
PRIOR ART
As an apparatus for controlling temperature of the corrosive fluid,
FIG. 10
shows an apparatus, which puts a peltier element to use.
The temperature control shown in
FIG. 10
contacts and fixes peltier element
41
on a surface of a heat exchanging block
42
, which has a large heat capacity as a thermo module and exchanges the heat with the corrosive fluid flowing through a tube path
44
. Further, the temperature control shown in
FIG. 10
contacts and fixes a thermo transfer means
43
on the opposite side of the heat exchanging block
42
of the peltier element
41
to control the temperature of the above corrosive fluid to a target temperature by controlling the operation of the peltier element
41
.
The above stated temperature control is provided with the heat exchanging block
42
on an endothermic side of the peltier element
41
, i.e., a cooling surface side and is provided with the thermo transfer means
43
on a heat releasing side of the peltier element
41
, i.e., a heating surface side, so that the corrosive fluid flowing through the tube path
44
is cooled by the peltier element
41
via the heat exchanging block
42
. At the same time, the heat released from the corrosive fluid moves to the heat releasing side of the peltier element
41
and the heat of the corrosive fluid is transferred to the cooling water flowing through a tube path
45
within the thermo transfer means
43
, so that the above stated temperature control can release the heat.
However, according to above stated conventional temperature control, coolness and heat from the peltier element
41
is transferred to the corrosive fluid flowing through the tube path
44
via the tube path
44
in the heat exchanging block
42
. The heat released from the peltier element
41
is transferred to the cooling water flowing through the tube path
45
via the tube path
45
within the thermo transfer means
43
. As a result, there is a problem such that both of the endothermic side and the heat releasing side of the peltier element
41
cannot take a large heat transferring area, so that an efficiency of the heat exchange is low.
Therefore, it is not possible to effectively utilize the difference between the temperature on the endothermic side and the temperature on the heat releasing side, which is given to the thermo module. Therefore, there is a problem such that the heat exchanger is compelled to be larger and the electric power cannot be effectively utilized.
In order to alternate the heat transferring area, it is necessary to change the design before and after the temperature control has been produced and it is difficult to increase and decrease the heat transferring area in conformity to the user's needs.
Further, since a conventional temperature control transfers the heat to the fluid flowing through the tube path via the tube path
44
in the heat exchanging block
42
and the tube path
45
within the thermo transfer means
43
, there is a problem such that the manufacturing cost of the heat exchanger becomes higher.
DISCLOSURE OF THE INVENTION
The present invention has been made taking the problems into consideration, an object of which is to provide a heat exchanger for a temperature control, which can take a large area for transferring the heat to the fluid while it is compact, has a good efficiency for exchanging the heat, can increase and decrease the heat transferring area in conformity to the user's needs and the manufacturing cost thereof is low.
In order to attain the above object, the heat exchanger for the temperature control according to the present invention has a laminate constitution such that a heat exchanging board with a plate constitution and a heating board are superposed alternately, wherein the heat exchanging board has a construction such that a flowing path defining board, in which a flowing path with a labyrinth construction is formed, is formed by a folded thin shell; the flowing path defining board defines the flow path with the labyrinth construction by layering more than two thin sheets having many openings so that one opening of respective thin sheets, which are adjacent each other, can be overlapped in a part with two openings of other thin sheet, which are adjacent each other and the flowing path with the labyrinth construction is formed; and the shell has an inflow hole into which the fluid flows and an outflow hole from which a fluid flows out passing through the flowing path with the labyrinth construction.
According to the heat exchanger for the temperature control of the present invention, it is preferable that the shell of the heat exchanging board is defined such that the periphery of a thin metal sheet is sealed by curling the periphery of the sheet. Further, it is appropriate that two heat exchanging boards interposed the heating boards composed of thermo modules and one of the two heat exchanging boards is a heat exchanging board at an endothermic side and other is a heat exchanging board at a heat releasing side; the heat exchanging board at the endothermic side and the heat exchanging board at the heat releasing side have a multilayer constitution such that the hat exchanging board at the endothermic side and the heat exchanging board at the heat releasing side are alternately overlapped with interposing the thermo modules.
Further, according to the heat exchanger for the temperature control of the present invention, more than two of the heat exchanging boards at the endothermic side and more than two of the heat exchanging boards at the heat releasing side are provided, respectively; and the inflow hole and the outflow hole of the shell are connected to common headers, which are interposed by the heat exchanging boards, respectively, between the two heat exchanging boards at the endothermic side and the two heat exchanging boards at the heat releasing side. Alternatively, according to the heat exchanger for the temperature control of the present invention, more than three of the heat exchanging boards at the endothermic side and more than three of said heat exchanging boards at the heat releasing side are provided, respectively; the inflow hole and the outflow hole of the shell are connected to common headers, respectively, between the two heat exchanging boards at the endothermic side and the two heat exchanging boards at the heat releasing side; the headers are put between the heat exchanging boards to be fixed therebetween with being fitted into the inflow hole or the outflow hole of the heat exchanging boards in liquid tight; and the inflow hole or the outflow hole of the heat exchanging board, into which the headers are not fitted, is connected to connecting ductworks for connecting the inflow hole and the outflow hole such that a fluid can communicate through respective holes in liquid tight, between the two heat exchanging boards at the endothermic side or the two heat exchanging boards at the heat releasing side.
The heat exchanger for a temperature control according to the present invention is characterized in that two heat exchanging boards interpose the heating boards composed of thermo modules and one of the two heat exchanging boards is a heat exchanging board at an endothermic side and other is a heat exchanging board at a heat releasing side; the heat exchanging board at the endothermic side and the heat exchanging board at the heat releasing side have a multilayer constitution such that the heat exchanging board at the endothermic side and the heat exchanging board at the heat releasing side are alternately overlapped with interposing the thermo modules; and more than one heat exchanging
Sakama Hiroyuki
Yaegashi Shigesuke
Ford John K.
SMC Corporation
LandOfFree
Heat exchanger for temperature control does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Heat exchanger for temperature control, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Heat exchanger for temperature control will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3058968