Heat exchanger

Heat exchange – Non-communicating coaxial enclosures

Reexamination Certificate

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Details

C165S299000, C165S905000, C029S890030, C029S890036, C029S056500

Reexamination Certificate

active

10825744

ABSTRACT:
A method for adjusting temperature of a machining liquid, e.g., slurry, etching liquid, by passing the machining liquid through a heat exchanger. The heat exchanger, which adjusts the temperature of the machining liquid, includes a ceramic heat exchanging tube which is made by baking silicon carbide (SiC).

REFERENCES:
patent: 4730094 (1988-03-01), Aramaki et al.
patent: 4789506 (1988-12-01), Kasprzyk
patent: 5238057 (1993-08-01), Shelter et al.
patent: 38 31 812 (1990-03-01), None
patent: 0 528 411 (1993-02-01), None
patent: 0 744 587 (1996-11-01), None
patent: 1 504 702 (1978-03-01), None
patent: 1 018974 (1989-01-01), None

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