Heat exchange apparatus for high temperature LPCVD equipment

Heat exchange – Regenerator – Checker brick structure

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165 47, 165169, 219 1049R, 277 22, F28F 312

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046306692

ABSTRACT:
A heat exchanger apparatus having two sleeves which fit together to seal a sinuous heat exchange fluid channel between them where the channel is open along its length prior to assembly. The sleeves may be made removable to permit easy cleaning of the heat exchange fluid channel. The heat exchange fluid channel may thus be directly cleaned along its entire length in contrast to conventional heat exchangers employing tubes, where the tube interior can be accessed only from the ends. In one embodiment, the channel has a rectangular cross-section to enhance the heat exchange capability of the apparatus.

REFERENCES:
patent: 4139220 (1979-02-01), Faccou et al.
patent: 4293755 (1981-10-01), Hill et al.
patent: 4439041 (1984-03-01), Schaeffer et al.
patent: 4468549 (1984-08-01), Arnosky
Kern, et al., "Low Pressure Chemical Vapor Deposition for Very Large-Scale Processing-A Review," IEEE Trans. Elec. Dev., vol. Ed-26, No. 4, Apr. 1979, pp. 647-657.
Tedrow, et al., "Low Pressure Chemical Vapor Deposition of Titanium Silicide," Appl. Phys. Lett., 46(2), Jan. 15, 1985, pp. 189-191.
HD Special Products, Inc., "Vacuum End Caps" brochure.

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