Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1997-05-21
1998-11-03
Walberg, Teresa J.
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
392417, 392418, 392411, 432 59, 34273, 34308, F27B 906, F27D 1100
Patent
active
058312480
ABSTRACT:
A heat-controlling device is provided with a transporting carriage for supporting and transporting a semiconductor substrate and a heating device having a plurality of heaters which apply heat in the width-wise direction of the heat-receiving member that is perpendicular to the transporting direction thereof and which are individually controlled by a controller. The controller only operates a set of the heaters that are adjacent the semiconductor substrate. Among the heaters being operated, those heaters, which are located at at least the leading end and the rear end in the transporting direction, have their outputs successively varied in accordance with the movement of the semiconductor substrate. Thus, it becomes possible to easily narrow the temperature distribution of the semiconductor substrate merely by controlling the output of the heaters.
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Hojyo Yoshiyuki
Kakiwaki Shigeaki
Okuda Tohru
Cu Jiping
Sharp Kabushiki Kaisha
Walberg Teresa J.
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