Head for high speed spinner having a vacuum chuck

Details Head for high speed spinner having a vacuum chuck Head for high speed spinner having a vacuum chuck

1980-06-27

1981-07-28

Beck, Shrive P.

Work holders

With fluid means

Vacuum-type holding means

118 50, 118 52, 427240, B60G 1122

Patent

active

042806895

ABSTRACT:
A head 10 for a high-speed spinner characterized by a substantially cylindrical body adapted to be mounted at the distal end of a vertically oriented drive shaft 16 and including a vacuum chuck having an upwardly facing chamber 30 circumscribed by an annular surface 32 for receiving in supported relation a silicon chip, and an ordered array of low-pressure cavities defined about the periphery of the body and connected in communication with the chamber via radially extended bores 38 for translating low pressures to the chamber 30 as the head is angularly displaced, whereby a pressure differential is established across the chip for securing it to the head.

REFERENCES:
patent: 3389682 (1968-06-01), Gardner
patent: 3426727 (1969-02-01), Balain et al.
patent: 3730134 (1973-05-01), Kadi
patent: 3791342 (1974-02-01), Boyer et al.
patent: 4103643 (1978-08-01), Staunton
patent: 4184292 (1980-01-01), DeFazio et al.
IBM Technical Disclosure Bulletin, vol. 14, No. 10 (Mar. 1972) Walker "Wafer Holder," pp. 3015-3016.

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