Having a protective film of a polymer having a fluorine-containi

Details Having a protective film of a polymer having a fluorine-containi Having a protective film of a polymer having a fluorine-containi

1990-04-16

1992-05-26

Carroll, J.

357 54, 357 72, H01L 2934, H01L 2328

Patent

active

051172720

ABSTRACT:
A semiconductor integrated circuit device having a protective film made of a polymer having a fluorine-containing aliphatic cyclic structure.

REFERENCES:
patent: 4933305 (1990-07-01), Kikkawa
patent: 4977199 (1990-12-01), Koleske et al.
patent: 4980268 (1990-12-01), Bartmann et al.
K. Sato et al., "A Novel planar multilevel interconnection technology utilizing polyimide", IEEE Transaction on Parts, Ayamds and Packaging, vol. PHP-9 (Sep. 1973), pp. 176-180.
Patent Abstracts of Japan, vol. 13, No. 278 (C-611) 26 Jun. 1989, & JP-A-01 075575 (Honny Chem Ind Co. Ltd.) 22 Mar. 1989.
Patent Abstracts of Japan, vol. 12, No. 20 (E-575) (2867) 21 Jan. 1988, & JP-A-62 177950 (Hitachi) 01 Aug. 1987.
IEEE Transactions on Electron Devices, vol. ED-26, No. 1, Jan. 1979, New York US pp. 77-83; A. Christo et al.: "Reliability of hybrid encapsulation based on fluorinated polymeric materials" p. 78, Para. A.

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