Harmonic multiplexer

Details Harmonic multiplexer Harmonic multiplexer

2006-08-01

2006-08-01

Paschall, Mark (Department: 3742)

Electric heating

Metal heating

By arc

C219S121410, C156S345480, C156S345240, C204S298340

Reexamination Certificate

active

07084369

ABSTRACT:
A method and apparatus for maintaining a plasma in a plasma region, by supplying RF power at a fundamental frequency to the plasma region together with a gas in order to create an RF electromagnetic field which interacts with the gas to create a plasma that contains electromagnetic energy components at frequencies that are harmonics of the fundamental frequency. The energy components at frequencies that are harmonics of the fundamental frequency are monitored and controlled by placing a harmonic multiplexer containing a matching network and RF filter elements in energy receiving communication with the plasma.

REFERENCES:
patent: 6887339 (2005-05-01), Goodman et al.
patent: 6902646 (2005-06-01), Mahoney et al.
patent: 2003/0022466 (2003-01-01), Escalera et al.
patent: 2005/0151489 (2005-07-01), Lys et al.

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