Harmonic derived arc detector

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – For fault location

Reexamination Certificate

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C324S464000

Reexamination Certificate

active

07728602

ABSTRACT:
An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.

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