Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – For fault location
Reexamination Certificate
2007-02-16
2010-06-01
Dole, Timothy J (Department: 2831)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
For fault location
C324S464000
Reexamination Certificate
active
07728602
ABSTRACT:
An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.
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Han Yufeng
Polizzo Salvatore
Radomski Aaron T.
Smyka Jonathan
Valcore John
Dole Timothy J
Harness & Dickey & Pierce P.L.C.
MKS Instruments Inc.
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