Scanning-probe techniques or apparatus; applications of scanning – Scanning or positioning arrangements – i.e. – arrangements for...
Reexamination Certificate
2010-01-29
2011-12-06
Wells, Nikita (Department: 2881)
Scanning-probe techniques or apparatus; applications of scanning
Scanning or positioning arrangements, i.e., arrangements for...
C850S005000, C850S011000, C250S309000, C073S105000
Reexamination Certificate
active
08074291
ABSTRACT:
A scanning probe microscope and method for operating the same to correct for errors introduced by a repetitive scanning motion are disclosed. The microscope includes an actuator that moves the probe tip relative to the sample in three directions. The actuator executes a repetitive motion, characterized by a repetitive motion frequency, in one of the directions, and changes a distance between the sample and the probe tip in a second one of the directions. A probe position signal generator generates a probe position signal indicative of a position of the probe tip relative to the cantilever arm. A probe signal correction generator generates a corrected probe position signal by correcting the probe position signal for errors introduced by the repetitive motion. A controller maintains the probe tip in a fixed relationship with respect to the sample in the second one of the dimensions based on the corrected probe position signal.
REFERENCES:
patent: 5723775 (1998-03-01), Watanabe et al.
patent: 2008/0277582 (2008-11-01), Shi et al.
Agilent Technologie,s Inc.
Wells Nikita
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