Harmonic and subharmonic filter

Wave transmission lines and networks – Coupling networks – Frequency domain filters utilizing only lumped parameters

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333175, 333 99PL, H03H 707

Patent

active

051874571

ABSTRACT:
A harmonic and subharmonic filter is coupled between a high power RF energy source and a non-linear RF load via a matching network, such as a plasma chamber. The filter passes high power RF energy in a band centered on a predetermined radio frequency, i.e., 13.56 MHz, but blocks and attenuates out-of-band energy at frequencies which are multiples of or fractions of the predetermined frequency. The harmonic and subharmonic filter comprises an input terminal, an output terminal, a series LC resonance path connected between the input and output terminals, and tuned to the predetermined radio frequency, a series resistive path formed of first and second resistors, and a parallel LC resonance path between the junction of the two resistors and ground.

REFERENCES:
patent: 3569846 (1971-03-01), Matsuura
patent: 4375051 (1983-02-01), Theall
patent: 4383203 (1983-05-01), Stanley
patent: 4629940 (1986-12-01), Gagne et al.
patent: 4679007 (1987-07-01), Reese et al.
H. Paul Shuth, "Interstage 50-Ohm Terminator for VHF Converters"Ham Radio, Feb. 1988.
Matthew Fivash, "Dissipative Filters", RF Design, Oct. 1988, pp. 73-83.

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