Hard vacuum pump

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact

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Details

415170R, F01D 136

Patent

active

043325220

ABSTRACT:
The invention relates to a high-speed hard vacuum rotary pump. A hard vacuum rotary pump which includes a rotor (2) driven by a motor (20) disposed on the outside of the pump body and connected to the motor by a drive shaft (1) which is sealed by a grooved dynamic seal (8) is characterized in that said shaft is supported firstly by an outer bearing (6) disposed on the outside of the pump body (4) and secondly by an inner bearing (5) disposed inside the pump body and lubricated with grease. The invention applies in particular to molecular and turbomolecular vacuum pumps.

REFERENCES:
patent: 3131942 (1964-05-01), Ertaud
patent: 3189264 (1965-06-01), Becker

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