Hard mask method of forming a reader of a magnetic head

Details Hard mask method of forming a reader of a magnetic head Hard mask method of forming a reader of a magnetic head

2007-04-24

2007-04-24

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603150, C029S603160, C029S603180, C360S119050, C360S125330, C360S324000, C360S326000

Reexamination Certificate

active

10607779

ABSTRACT:
A method of forming a reader of a magnetic head includes multiple processing steps. First, a sensor is formed having an air bearing surface. Next, a hard mask is formed on the sensor extending a distance from the air bearing surface substantially equal to the desired stripe height of the sensor. Finally, a portion of the sensor not covered by the hard mask is removed.

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“Advances in Dry Etching of GMR Materials”, James M. Klemm and Edward W. Ostan., http://semiconductors.unaxis.com/en/chiponline—72dpi/issue4/c4p28—72.pdf.

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