Hard laminated film, method of manufacturing the same and...

Details Hard laminated film, method of manufacturing the same and... Hard laminated film, method of manufacturing the same and...

2007-08-21

2007-08-21

Turner, Archene (Department: 1775)

Stock material or miscellaneous articles

Structurally defined web or sheet

Including components having same physical characteristic in...

C428S212000, C428S697000, C428S698000, C428S699000, C428S704000

Reexamination Certificate

active

11045137

ABSTRACT:
A hard laminated film wherein a layer A and a layer B having specific compositions are deposited alternately so that the compositions of layer A and layer B are different. The thickness of layer A per layer is twice or more the thickness of layer B per layer, the thickness of layer B per layer is 0.5 nm or more, and the thickness of layer A per layer is 200 nm or less.Layer A has a cubic rock-salt crystal structure such as that of Ti, Cr, Al, V nitride, carbonitride or carbide, and layer B is a hard film having a crystal structure other than cubic such as that of BN, BCN, SiN, SiC, SiCN, B—C, Cu, CuN, CuCN or metallic Cu. Alternatively, layer A has a chemical composition satisfying the following formula (1), and layer B has a chemical composition satisfying the following formula (2).Layer A: Cr(BaCbN1-a-b-cOc)in-line-formulae description="In-line Formulae" end="lead"?0≦a≦0.15, 0≦b≦0.3, 0≦c≦0.1, 0.2≦e≦1.1  (1)in-line-formulae description="In-line Formulae" end="tail"?Layer B: B1-s-tCsNtin-line-formulae description="In-line Formulae" end="lead"?0≦s 0.25, (1-s-t)/t≦1.5  (2)in-line-formulae description="In-line Formulae" end="tail"?Alternatively, Layer A has a specific atomic ratio composition of (Ti1-x-yAlxMy)(BaCbN1-a-b-cOc) and Layer B has one or more specific atomic ratio compositions selected from among the compositions B1-x-yCxNy, Si1-x-yCxNy, C1-xNx, Cu1-y(CxN1-x)y. Alternatively, Layer A has one of the following Compositional Formulae 1 or 2. Formula 1: (Ti1-x-yAlxMy), (BaCbN1-a-b-cOc), Formula 2: (Cr1-αXα)(BaCbN1-a-b-cOc)e(X is one or more metal elements selected from among Ti, Zr, Hf, V, Nb, Ta, Mo, W, Al, Si. Layer B has the following compositional formula 3. Formula 3: M(BaCbN1-a-b-cOc). M is one or more metal elements selected from among W, Mo, V, Nb.

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