Hard film

Details Hard film Hard film

2007-11-13

2007-11-13

Turner, Archene (Department: 1775)

Stock material or miscellaneous articles

Composite

Of inorganic material

C106S286200

Reexamination Certificate

active

10807332

ABSTRACT:
A hard film formed of a material containing a (M1-xSix)(C1-dNd) compound, wherein M is at least one of Al and the elements in groups 3A, 4A, 5A and 6A, 0.45≦x≦0.98 and 0≦d≦1, where x, 1-x, d and 1-d are atomic ratios of Si, M, N and C, respectively.

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