Hard carbon thin film and method of forming the same

Details Hard carbon thin film and method of forming the same Hard carbon thin film and method of forming the same

1998-03-19

2000-05-23

Turner, Archene

Stock material or miscellaneous articles

Self-sustaining carbon mass or layer with impregnant or...

428212, 428697, 428698, 428699, 428701, 428702, 427249, B32B 906, C23C 1600

Patent

active

060663995

ABSTRACT:
A hard carbon thin film formed on a substrate has a graded structure in which a ratio of sp.sup.2 to sp.sup.3 carbon-carbon bonding in the thin film decreases in its thickness direction from a thin film/substrate interface toward a surface of the thin film.

REFERENCES:
patent: 4647494 (1987-03-01), Meyerson et al.
patent: 4777090 (1988-10-01), Ovshinsky et al.
patent: 4877677 (1989-10-01), Hirochi et al.
patent: 5173089 (1992-12-01), Tanabe et al.
patent: 5237967 (1993-08-01), Willermet et al.
patent: 5368937 (1994-11-01), Itoh

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