Hard carbon films formed from plasma treated polymer surfaces

Details Hard carbon films formed from plasma treated polymer surfaces Hard carbon films formed from plasma treated polymer surfaces

2006-11-21

2006-11-21

Seidleck, James J. (Department: 1711)

Stock material or miscellaneous articles

Composite

C427S446000, C428S412000, C428S417000, C428S426000, C428S522000, C428S523000

Reexamination Certificate

active

07138180

ABSTRACT:
Hard-carbon films with unique structures, methods for producing the films, and articles coated by the films are provided. These hard-carbon films are synthesized by the plasma surface treatment of a polymer substrate or a polymer-coated substrate in a plasma containing SFxspecies, where x is less than 6, and may be produced under room temperature, low pressure environments.

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