Hard-carbon-film-coated substrate and apparatus for forming the

Details Hard-carbon-film-coated substrate and apparatus for forming the Hard-carbon-film-coated substrate and apparatus for forming the

1995-06-05

1997-05-13

Turner, Archene

Stock material or miscellaneous articles

Web or sheet containing structurally defined element or...

Physical dimension specified

428408, 428446, 428457, 428469, 428698, 428701, 428702, C04B 4185

Patent

active

056290861

ABSTRACT:
A hard-carbon-film-coated substrate includes in stacked sequence a substrate, an intermediate layer, and a hard carbon film. The substrate consists of a metal or an alloy mainly composed of Ni or Al, or stainless steel. The intermediate layer is mainly composed of Ru, Si, Ge or carbon, or is a mixed layer including Ru, Si, or Ge mixed with at least one of carbon, nitrogen or oxygen, with a composition gradient across its thickness. An apparatus for forming the coated substrate especially includes means for forming the intermediate layer and means for forming the hard carbon film in the same vacuum chamber.

REFERENCES:
patent: 4647494 (1987-03-01), Meyerson et al.
patent: 4707384 (1987-11-01), Schachner et al.
patent: 5380349 (1995-01-01), Taniguchi et al.

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