Hard and lubricant thin film of iron base metallic material coat

Details Hard and lubricant thin film of iron base metallic material coat Hard and lubricant thin film of iron base metallic material coat

1990-12-27

1993-03-30

Sluby, P. C.

Stock material or miscellaneous articles

Structurally defined web or sheet

Including components having same physical characteristic in...

428408, 428457, 428693, B32B 900, C23C 1626

Patent

active

051982854

ABSTRACT:
A hard and lubricant thin film of amorphous carbon-hydrogen-silicon and a process of producing the same. The thin film comprises carbon and hydrogen as major components, the balance mainly containing a silicon-based material, and it contains diamond-like carbon. The content of hydrogen is from 30 to 50% by atomic and the content of carbon is 70% by atomic or more with respect to the total composition except hydrogen.
An iron-based metallic material having the thin film of amorphous carbon-hydrogen-silicon formed thereon and a process for producing the same are also provided. The iron-based matallic material is very hard and has a small coefficient of friction.

REFERENCES:
patent: 4525417 (1985-06-01), DiMigen et al.
Patent Abstracts of Japan, vol. 13, No. 134, (C-581) [3482], 4 Apr. 1989; & JP-A-63 297 208 (NEC Corp.) Dec. 1988.
Patent Abstracts of Japan, vol. 12, No. 438 (C-544) [3285], 17 Nov. 1988; & AP-A-63 162 871 (NEC Corp.) Jul. 1988.
Chemical Abstracts, vol. 112, No. 12, 19 Mar. 1990, p. 250, abstract no. 102680v, Columbus, OH., U.S.; K. Oguri et al.: "Hard amorphous carbon-silicon coatings by plasma-assisted chemical vapor deposition", & Proc. Jpn. Symp. Plasma Chem. 1989, 2, 197-202.
Journal of Material Research, vol. 5, No. 11, Nov., 1990, pp. 2567-2571; K. Oguri et al.: "Low friction coatings of diamond-like carbon with silicon prepared by plasma-assisted chemical vapor deposition".

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