Handling arm for boats for thermal treatment of semiconductor wa

Details Handling arm for boats for thermal treatment of semiconductor wa Handling arm for boats for thermal treatment of semiconductor wa

1989-01-25

1992-01-21

Dunkins, Bruce W.

Machines not elsewhere specified

Miscellaneous

Patent

active

D03233324

REFERENCES:
patent: D199694 (1964-12-01), Belke
patent: D272743 (1984-02-01), Knox
patent: 4344729 (1982-08-01), Orsinger et al.
patent: 4787805 (1988-11-01), Kosikowski

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