Handler for testing semiconductor device

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Reexamination Certificate

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11266192

ABSTRACT:
Handler for testing a semiconductor device including a carrier unit for detachably holding, and carrying a plurality of devices, a test board having a plurality of test sockets for respectively coming into contact with the devices held at the carrier unit for testing the devices, a press unit for respectively pressing, and bringing the devices on the carrier unit into contact with the test sockets on the test board when the carrier unit is aligned with the test board, a spray unit for directly, and selectively spraying a high or low temperature gas to surfaces of the devices in contact with the test sockets from a position in a neighborhood of the devices of the carrier unit, to heat or cool the devices to a preset temperature, a gas supply unit for selectively supplying the high or low temperature gas to the spray unit, and a control unit for controlling the gas supply to the spray unit from the gas supply unit, thereby directly spraying high or low temperature gas to a surface of the device without an enclosed chamber for providing a particular temperature environment.

REFERENCES:
patent: 5579826 (1996-12-01), Hamilton et al.
patent: 5894217 (1999-04-01), Igarashi et al.
patent: 6104183 (2000-08-01), Kobayashi et al.
patent: 6205799 (2001-03-01), Patel et al.
patent: 6249132 (2001-06-01), Amemiya
patent: 6406246 (2002-06-01), Itoh et al.
patent: 6445203 (2002-09-01), Yamashita et al.
patent: 2004/0051545 (2004-03-01), Tilton et al.
patent: 09-088236 (1997-04-01), None
patent: 09-120937 (1997-05-01), None
patent: WO 98/45878 (1998-04-01), None
patent: 2001-049495 (2001-02-01), None
patent: 389950 (2000-05-01), None

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