Handle for wafer carrier and docking station

Details Handle for wafer carrier and docking station Handle for wafer carrier and docking station

1996-12-20

1998-07-21

Kramer, Dean

Handling: hand and hoist-line implements

Detachable lifter

206711, 211 4118, B65D 2528

Patent

active

057825173

ABSTRACT:
The invention is a semiconductor handling apparatus including a handle device (10) for attaching to and lifting semiconductor wafer carriers (40) from a single end, wherein the carrier has two spaced apart slots (50A, 51A) on one end (42) and a docking station (60) for the carrier (40). The wafer carrier (40) is carried by handle 10 and is placed in a slot (62) in docking station (60) to allow a worker to carry semiconductor wafers (55) in carrier (40) to different processing stations, and docking station (60) provides a container (60a) to receive processing chemicals that drain from wafers (55).

REFERENCES:
patent: 3939973 (1976-02-01), Wallestad
patent: 5029922 (1991-07-01), DiNapoli et al.
patent: 5033406 (1991-07-01), Lee
patent: 5100190 (1992-03-01), Molinaro
patent: 5364144 (1994-11-01), Satterfield et al.
patent: 5390972 (1995-02-01), Galloway

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