Handle for wafer carrier

Details Handle for wafer carrier Handle for wafer carrier

1991-03-04

1992-05-05

Price, William I.

Receptacles

Outlet or junction box type

Sectional receptacle

206328, 294 33, B65D 2528

Patent

active

051100010

ABSTRACT:
An improved handle for attaching to and supporting a wafer carrier is described in which robotic fixtures of the wafer carrier are utilized. The locking mechanism of the handle engages the robotic fixtures and then a configuration of flanges and shaped voids attaches to the robotic fixtures in a manner which is secure, even at elevated temperatures common to semiconductor manufacturing processes. Manipulation of the handle conveniently detaches the locking mechanism.

REFERENCES:
patent: 3701558 (1972-10-01), Baker
patent: 3861733 (1975-01-01), Vander Mey
patent: 3923191 (1975-12-01), Johnson
patent: 3926305 (1975-12-01), Wallestad
patent: 3939973 (1976-02-01), Wallestad
patent: 3961877 (1976-06-01), Johnson

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