Hand having rocking mechanism and substrate delivering...

Work holders – Holder mounted for movement – Including means to shift holder position

Reexamination Certificate

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C414S941000, C294S103100

Reexamination Certificate

active

08038136

ABSTRACT:
A hand1is constituted by a hand base4serving as a base portion, a rocking hand3disposed to be superposed on the hand base4and serving to support a substrate2, and a rocking mechanism5provided between the hand base4and the rocking hand3and serving to support the rocking hand3to be tiltable and movable in parallel with respect to the hand base4.

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patent: 7547053 (2009-06-01), Yoshida et al.
patent: 7644968 (2010-01-01), Hirooka et al.
patent: 7712806 (2010-05-01), Adachi
patent: 2004/0037682 (2004-02-01), Yoshioka et al.
patent: 2005/0210669 (2005-09-01), Yoshida et al.
patent: 2008/0156357 (2008-07-01), Mitsuyoshi
patent: 2008/0237172 (2008-10-01), Uratani et al.
patent: 2009/0092469 (2009-04-01), Sekimoto et al.

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