Halogen detection with solid state sensor

Details Halogen detection with solid state sensor Halogen detection with solid state sensor

1988-06-24

1990-01-09

Reynolds, Bruce A.

Electrical resistors

Resistance value responsive to a condition

Gas, vapor, or moisture absorbing or collecting

73 23, 422 88, H01L 700

Patent

active

048931080

ABSTRACT:
A solid state thin film detection and measurement apparatus for halogen gas components such as chlorine in a gas mixture is described. The detection cell employs plural response modes to the halogen gas including response to the thermal effect of a halogen and thin film reaction and response to the thermal and ion diffusion effects of the halogen reaction with a halide supporting substrate member. These plural responses are manifested by an electrical resistance change in the thin film element and this change is sensed with a four-lead measurement arrangement. The use of plural measurement cells each of a different composition and computerized multiplexing of thin film resistance signals is included as are identification of possible thin film and substrate compositions.

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