Hall sensor with integrated pole pieces

Details Hall sensor with integrated pole pieces Hall sensor with integrated pole pieces

1987-01-09

1988-09-20

Edlow, Martin H.

Dynamic magnetic information storage or retrieval

Head

Core

357 55, 360112, H01L 2722, H01L 2982, H01L 2996, H01L 4300

Patent

active

047729295

ABSTRACT:
A Hall element is formed in one surface of a silicon die. A trench is etched away in the opposite die surface in a region adjacent the Hall element. An insulating silicon dioxide is grown on both surfaces and a layer of ferromagnetic metal is deposited on both surfaces to form a pair of pole pieces intimately integrated with the Hall element.

REFERENCES:
patent: 2725504 (1955-11-01), Dunlap, Jr.
patent: 3114010 (1963-12-01), Wolf et al.
patent: 3146317 (1964-08-01), Kuhrt et al.
patent: 3800193 (1974-03-01), Ashar et al.
patent: 4021767 (1977-05-01), Nonaka et al.
patent: 4180422 (1979-12-01), Rosvold
patent: 4186481 (1980-02-01), Noguchi et al.
patent: 4253107 (1981-02-01), MacDougall
patent: 4477853 (1984-10-01), Lemke
patent: 4587509 (1986-05-01), Pitt et al.

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