Hall element and magnetic sensor system employing the same

Electrical resistors – Resistance value responsive to a condition – Magnetic field or compass

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H01L 4300

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active

050558200

ABSTRACT:
A Hall device a semiconductor region embedded in a substrate, the embedded region having opposite main and back surfaces and a pair of side surfaces parallel to and spaced apart from respective ones of the main, back and side surfaces of the substrate. A pair of current electrodes are formed of first highly doped regions embedded in the substrate respectively (i) between the main surfaces of the substrate and the semiconductor region and (ii) between the back surfaces of the substrate and semiconductor region so as to sandwich the semiconductor region between the main and back surfaces of the substrate. A pair of Hall voltage detecting electrodes are formed of second highly doped regions embedded in the substrate, respectively between side surfaces of the substrate and semiconductor region. The substrate can be made of SiO.sub.2 to increase electrical isolation between the electrodes.

REFERENCES:
patent: 4584552 (1986-04-01), Suzuki et al.
patent: 4829352 (1989-05-01), Popovic et al.
Kogyo Chosakai Publishing Co., Ltd., "The Technique for Utilizing a Sensor", edited by Kogyochosakai-Henshubu, Japan, 1984, pp. 260-261.

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