Stock material or miscellaneous articles – Composite – Of inorganic material
Reexamination Certificate
2007-02-20
2007-02-20
McNeil, Jennifer C. (Department: 1775)
Stock material or miscellaneous articles
Composite
Of inorganic material
C430S005000, C204S192100
Reexamination Certificate
active
10679264
ABSTRACT:
A halftone phase shift mask blank has a phase shifter film on a transparent substrate. The phase shifter film is composed of a metal silicide compound containing Mo, at least one metal selected from Ta, Zr, Cr and W, and at least one element selected from O, N and C. The halftone phase shift mask blank has improved processability and high resistance to chemicals, especially to alkaline chemicals.
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Ishihara Toshinobu
Okazaki Satoshi
Birch & Stewart Kolasch & Birch, LLP
Ivey Elizabeth D.
McNeil Jennifer C.
Shin-Etsu Chemical Co. , Ltd.
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