Halftone mask having a shielding pattern and plural...

Details Halftone mask having a shielding pattern and plural... Halftone mask having a shielding pattern and plural...

2011-06-28

2011-06-28

Huff, Mark F (Department: 1721)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

Reexamination Certificate

active

07968257

ABSTRACT:
A halftone mask includes a shielding pattern partially formed on a transparent substrate; a first halftone transmission pattern partially formed on the transparent substrate; and a second halftone transmission pattern formed on the first halftone transmission layer. On this halftone mask, a width of the second halftone transmission pattern is narrower than a width of the first halftone transmission pattern.

REFERENCES:
patent: 5856049 (1999-01-01), Lee
patent: 6391499 (2002-05-01), Kim et al.
patent: 2001/0009745 (2001-07-01), Kim
patent: 2003/0190556 (2003-10-01), Nakashima et al.
patent: 1152292 (2004-08-01), None
patent: 2005 24730 (2005-01-01), None
patent: 10 2005 0016704 (2005-02-01), None

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