Half mirror film producing method and optical element...

Details Half mirror film producing method and optical element... Half mirror film producing method and optical element...

2005-06-07

2005-06-07

Wong, Don (Department: 2821)

Electric lamp and discharge devices: systems

Plural power supplies

Plural cathode and/or anode load device

C315S169300, C359S016000

Reexamination Certificate

active

06903512

ABSTRACT:
A method of producing a half mirror film on a substrate having a light transmissive property, comprising steps of: electrically discharging between electrodes facing each other under an atmospheric pressure or an approximate atmospheric pressure so as to make an reactive gas on a plasma state; and exposing a substrate to the reactive gas on the plasma state so as to form a half mirror film on the substrate.

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