Gyro-sensor comprising a plurality of component units, and...

Details Gyro-sensor comprising a plurality of component units, and... Gyro-sensor comprising a plurality of component units, and...

2007-09-04

2007-09-04

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Structural installation or mounting means

C073S431000

Reexamination Certificate

active

11141054

ABSTRACT:
Provided are a gyro-sensor including a plurality of component units and a method of fabricating the gyro-sensor. The gyro-sensor includes: a substrate; a micro electro mechanical system structure including a surface including a predetermined area in which a cavity is formed and connected to an upper surface of the substrate to output a vibration signal proportional to an external rotation force; and a circuit unit positioned in the cavity, converting the vibration signal into a predetermined electric signal proportional to a circular angular velocity, and outputting the predetermined electric signal.

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