Gyro sensor

Details Gyro sensor Gyro sensor

2005-12-09

2008-10-14

Williams, Hezron E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S504120, C073S503300, C073S514160, C073S514010

Reexamination Certificate

active

07434466

ABSTRACT:
The electrostatically-driven/capacitance-detection type gyro sensor has a sensing element including a movable part, the sensitivity of the sensing element and accordingly the sensitivity of a sensor output signal thereof being kept unchanged by controlling the amplitude of displacement or displacing velocity of the movable part and by using a reference voltage independent of variation of a power supply voltage, even there occurs a change in the vibrating state of the movable part due to temperature change or secular variation.

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“Single-Chip Surface Micromachined Integrated Gyroscope With 50° /h Allan Deviation” written by John A. Geen et al.;“IEEE Journal of Solid-State Circuits”, vol. 37, No. 12; Dec. 2002.
“±150° /s Single Chip Yaw Rate Gyro with Single Conditioning, ADXRS150” by Analog Devices, Inc.; 2003.
Office Action dated Oct. 16, 2007 in corresponding Japanese Patent Application No. 2004-358973 (and English translation).

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