Bearings – Linear bearing – With detection – nonbearing magnetic or hydraulic feature
Patent
1985-01-18
1986-12-23
Levy, Stuart S.
Bearings
Linear bearing
With detection, nonbearing magnetic or hydraulic feature
269 73, 384 12, 384448, B23Q 126, F16C 2900, F16C 3206, F16C 3302
Patent
active
046309420
ABSTRACT:
A guiding apparatus having a slider supported in a floating manner above a base by means of hydrostatic bearings, a pressurized fluid supplying means for supplying the hydrostatic bearings with a pressurized fluid, and detecting means for detecting the displacement of the slider with respect to a designated coordinate. The pressure of the pressurized fluid from the pressurized fluid supplying means is adjusted in accordance with a signal which is obtained as a result of the comparison between the value representing the reference position of the slider with respect to the base and the value actually measured by the detecting means, thereby adjusting the sizes of the gaps for forming hydrostatic fluid film for the hydrostatic bearings, thereby to correct the position of the slider to the designated position. With this arrangement, the absolute position of the slider is precisely determined without being affected by disturbance factors such as the precision of assembling of the base and the slider. This guiding apparatus is suited to use as precision positioning apparatus such as that used in the assembly of photomodule elements.
REFERENCES:
patent: 3053589 (1962-09-01), Cameron
patent: 3100130 (1963-08-01), Deffrenne
patent: 3271086 (1966-09-01), Deffrenne
patent: 4234175 (1980-11-01), Sato et al.
patent: 4351574 (1982-09-01), Furukawa et al.
patent: 4504048 (1985-03-01), Shiba et al.
Academy of Precision Machine, Spring 1982, pp. 204-206.
Inoue Hiroshi
Tokisue Hiromitsu
Tsumaki Nobuo
Hitachi , Ltd.
Levy Stuart S.
Sohacki Lynn M.
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