Optical waveguides – Planar optical waveguide – Thin film optical waveguide
Reexamination Certificate
2005-10-11
2005-10-11
Glick, Edward J. (Department: 2882)
Optical waveguides
Planar optical waveguide
Thin film optical waveguide
C438S031000
Reexamination Certificate
active
06954576
ABSTRACT:
Wafer-level electronic packages having waveguides and methods of fabricating chip-level electronic packages having waveguides are disclosed. A representative chip-level electronic package includes at least one waveguide having a waveguide core. In addition, another representative chip-level electronic package includes a waveguide having an air-gap cladding layer around a portion of the waveguide core. A representative method for fabricating a chip-level electronic package includes: providing a substrate having a passivation layer disposed on the substrate; disposing a waveguide core on a portion of the passivation layer; disposing a first sacrificial layer onto at least one portion of the passivation layer and the waveguide core; disposing an overcoat layer onto the passivation layer and the first sacrificial layer; and removing the first sacrificial layer to define an air-gap cladding layer within the overcoat polymer layer and around a portion of the waveguide core.
REFERENCES:
patent: 4959540 (1990-09-01), Fan et al.
patent: 5250816 (1993-10-01), Kitamura
patent: 5278925 (1994-01-01), Boysel et al.
patent: 5293626 (1994-03-01), Priest et al.
patent: 5416861 (1995-05-01), Koh et al.
patent: 5430567 (1995-07-01), Shaw et al.
patent: 5434524 (1995-07-01), Shaw et al.
patent: 5508835 (1996-04-01), Takahashi et al.
patent: 5515194 (1996-05-01), Kanterakis et al.
patent: 5677778 (1997-10-01), Kanterakis et al.
patent: 5708671 (1998-01-01), Siao et al.
patent: 5737458 (1998-04-01), Wojnarowski et al.
patent: 5812708 (1998-09-01), Rao
patent: 5889903 (1999-03-01), Rao
patent: 6008918 (1999-12-01), Kanterakis et al.
patent: 6125217 (2000-09-01), Paniccia et al.
patent: 6165890 (2000-12-01), Kohl et al.
patent: 6285813 (2001-09-01), Schultz et al.
patent: 6621972 (2003-09-01), Kimerling et al.
patent: 6785458 (2004-08-01), Mule′ et al.
patent: 6807352 (2004-10-01), Mule′ et al.
Bakir Muhannad
Gaylord Thomas K.
Glytsis Elias N.
Kohl Paul
Martin Kevin P.
Artman Thomas
Georgia Tech Research Corporation
Glick Edward J.
Thomas Kayden Horstemeyer & Risley LLP
LandOfFree
Guided-wave optical interconnections embedded within a... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Guided-wave optical interconnections embedded within a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Guided-wave optical interconnections embedded within a... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3474749