Guided wave device and method of fabrication thereof

Details Guided wave device and method of fabrication thereof Guided wave device and method of fabrication thereof

1997-12-30

1999-02-23

Ullah, Akm E.

Optical waveguides

Planar optical waveguide

Thin film optical waveguide

29 2535, 427100, G02B 610, H01L 4108

Patent

active

058752765

ABSTRACT:
A method for diffusing titanium into a single-crystal lithium niobate substrate and guided wave devices produced therefrom provide improved mode match with coupled fibers. Preferably, the titanium diffusion occurs at a diffusion temperature for a time between about 8 hours and about 18 hours. Outdiffusion of lithium oxide is allowed to occur during titanium diffusion. The outdiffused region, typically at least about 25 .mu.m, is much deeper than the titanium diffusion depth, typically about 5-10 .mu.m.

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