Stock material or miscellaneous articles – Structurally defined web or sheet – Physical dimension specified
Reexamination Certificate
2005-08-09
2005-08-09
McPherson, John A. (Department: 1756)
Stock material or miscellaneous articles
Structurally defined web or sheet
Physical dimension specified
C428S105000, C428S405000, C427S385500, C156S060000, C430S270100, C430S273100, C430S322000, C101S463100, C101S453000
Reexamination Certificate
active
06926953
ABSTRACT:
Copolymer structures are formed by exposing a substrate with an imaging layer thereon to two or more beams of selected wavelengths to form interference patterns at the imaging layer to change the wettability of the imaging layer in accordance with the interference patterns. A layer of a selected block copolymer is deposited onto the exposed imaging layer and annealed to separate the components of the copolymer in accordance with the pattern of wettability and to replicate the pattern of the imaging layer in the copolymer layer. Stripes or isolated regions of the separated components may be formed with periodic dimensions in the range of 100 nm or less.
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Cerrina Francesco
DePablo Juan J.
Nealey Paul F.
Peters Richard D.
Solak Harun H.
Chacko-Davis Daborah
Foley & Lardner LLP
McPherson John A.
Wisconsin Alumni Research Foundation
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