Guide rail apparatus for positioning flat objects for microscopi

Details Guide rail apparatus for positioning flat objects for microscopi Guide rail apparatus for positioning flat objects for microscopi

1984-01-23

1985-12-10

Henry, Jon W.

Horizontally supported planar surfaces

Industrial platform

Formed from folded semirigid material

108143, G02B 2126

Patent

active

045575681

ABSTRACT:
A work station for photomask inspection includes a microscope and a movable stage positioned below the objective of the microscope. A rectangular frame of the stage surrounds a viewable area of the stage. Rail means are bolted onto the frame at spaced apart positions corresponding to the width of the photomask that is to be inspected so as to position the photomask therebetween. The rails have end stops that are positionable according to the length of the photomask for positioning the end edges of the photomask therebetween.

REFERENCES:
patent: 2869418 (1959-11-01), Miller et al.
patent: 3765745 (1973-10-01), Burboeck
patent: 3862793 (1975-01-01), Gallant
patent: 4011004 (1977-03-01), Levine et al.
patent: 4012111 (1977-03-01), Masterson

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