Guide mechanism

Details Guide mechanism Guide mechanism

1985-08-30

1987-03-10

Footland, Lenard A.

Bearings

Linear bearing

With temperature, electrical, or orthogonal feature

384 10, 384 25, 384 58, 384 37, F16C 2902, F16C 2904

Patent

active

046487255

ABSTRACT:
A device for guiding movement of a stage, carrying thereon a semiconductor wafer, for printing in a reduced scale an integrated circuit pattern of a mask onto different portions of the semiconductor wafer through a reduction production lens, includes linear roller bearings for supporting the stage for movement in a predetermined direction, a slider and a roller for pressing a portion of the stage against the slider to thereby constrain the displacement of the stage in a direction perpendicular to the predetermined direction of movement, whereby higher accuracies of the stop position of the stage as well as higher speed of the stage movement are assured.

REFERENCES:
patent: 4515415 (1985-05-01), Szenger
patent: 4529255 (1985-07-01), Piotrowski
patent: 4547024 (1985-10-01), Teramachi

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