Guide apparatus for vertical movement of a stage

Details Guide apparatus for vertical movement of a stage Guide apparatus for vertical movement of a stage

1992-09-11

1993-12-14

Henry, Jon W.

Optical: systems and elements

Compound lens system

Microscope

359385, G02B 2126, G02B 2108

Patent

active

052708624

ABSTRACT:
A guide apparatus for vertical movement of a stage supports a stage supporting member for supporting the stage vertically movable by means of two groups of guide mechanism. Each of the guide mechanism groups is separately mountable with respect to the stage supporting member and is fixed to sandwich the stage supporting member from the left and right side. For one of the guide mechanisms, a highly rigid guide member machined with a high precision is used while a for the other guide mechanism, a guide member having a low rigidity as compared with the foregoing highly rigid guide member is used. One of the guide mechanisms is arranged so that its mounting position can be adjusted to match with the other guide mechanism. The mounting position of one of the guide mechanism is made higher than that of the other guide mechanism. The light path of the beam from a light source is provided lower than the mounting position of the foregoing one of the guide mechanisms.

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