Guard ring of a heating device of the light irradiation type

Details Guard ring of a heating device of the light irradiation type Guard ring of a heating device of the light irradiation type

1999-08-09

2000-12-26

Walberg, Teresa

Electric resistance heating devices

Heating devices

Radiant heater

118500, 118728, 219390, F26B 330

Patent

active

061671940

ABSTRACT:
A guard ring of a heating device of the light irradiation type in which temperature can be easily controlled, matching to the temperature change of the substrate is good, the temperature change of the substrate can be made uniform, and in which processing is also simple. The object is achieved by the having:

REFERENCES:
patent: 5527393 (1996-06-01), Sato et al.
patent: 5534072 (1996-07-01), Mizuno et al.

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