Growth of electroluminescent phosphors by MOCVD

Details Growth of electroluminescent phosphors by MOCVD Growth of electroluminescent phosphors by MOCVD

1996-11-27

1999-08-24

Hiteshew, Felisa

Coating processes

Coating by vapor, gas, or smoke

Organic coating applied by vapor, gas, or smoke

117104, C23C 1600

Patent

active

059422840

ABSTRACT:
A method for depositing a thin film including a sulfide of a metal on a substrate. First and second vapor streams are generated and combined in the vicinity of the substrate. The first vapor stream includes an organic compound containing the metal is generated. The second vapor stream includes a mercaptan. The preferred mercaptan is tertrary-butyl-mercaptan. The preferred metal precursor is a .beta.-diketonate of the metal.

REFERENCES:
Bessergenev, V. G., et al., "Optical and Structural Proper Ties to ZNS and ZnS:Mn Films Prepared by CVD Method", Materials Research Bulletin, vol. 30, No. 11, 1995, pp. 1393-1400.
Lovergine, N. et al., "Metalorganic Vapour Phase Epitaxy Growth of ZnS Layers by (t-BuOSH and Me2Zn:Et3N Precursors", Journal of Crystal Growth, vol. 156, 1995, pp. 45-51.
Helbing, R. et al., "Growth of CaS Thin Films by Solid Source Metalorganic Chemical Vapor Deposition", Journal of Crystal Growth, vol. 146, 1995, pp. 599-603.

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