Growth of bird's beak free semi-rox

Details Growth of bird's beak free semi-rox Growth of bird's beak free semi-rox

1985-01-31

1986-12-23

Swisher, Nancy

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428137, 428192, 428446, 428698, B32B 1504

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046312196

ABSTRACT:
An oxygen-impervious pad structure which reduces the bird's beak profiles in semi-recessed oxide isolation regions. The sidewalls of a conventional silicon oxide - silicon nitride pad are coated with a thick layer of oxynitride. A thin layer of oxynitride is grown on the substrate surface prior to deposition of the thick oxynitride layer. The thick oxynitride layer prevents lateral oxidizing specie diffusion through the oxide layer of the conventional pad, and the thin oxynitride layer prevents lateral oxidizing specie diffusion through the pad-substrate interface into the substrate region beneath the pad.

REFERENCES:
patent: 3966514 (1976-06-01), Feng et al.
patent: 4173674 (1979-11-01), Mimura et al.
patent: 4187344 (1980-02-01), Fredericksson
patent: 4271583 (1981-06-01), Kahny et al.
patent: 4312899 (1982-01-01), Lahmann
patent: 4416952 (1983-11-01), Nishizawa et al.
patent: 4455351 (1984-06-01), Camlibel et al.
Ho et al, "Elimination of Bird's Beak in ROI Process", IBM Technical Disclosure Bulletin, vol. 24, No. 2, Jul. 1981, pp. 1290-1292.
Chui et al, "A Bird's Beak Free Local Oxidation Technology Feasible for VLSI Circuits Fabrication", IEEE Transactions on Electron Device vol. ED-29, No. 4, Apr. 1982, pp. 536-540.
Gaind et al, "Physicochemical Properties of Chemical Vapor-Deposited Silicon Oxynitride from a SiH4-CO.sub.2 -NH.sub.3 -H.sub.2 System", J. Electrochem Soc.: Solid-State Science and Technology, vol. 125, No. 1, Jan. 1978, pp. 139-145.

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