Coating processes – Coating by vapor – gas – or smoke
Patent
1997-04-08
1999-07-06
King, Roy V.
Coating processes
Coating by vapor, gas, or smoke
4272551, 4272552, C23C 1600
Patent
active
059195223
ABSTRACT:
A method of forming a thin film of BaSrTiO.sub.3 on a substrate in a chemical vapor deposition zone, with transport of a metal precursor composition for the metal-containing film to the chemical vapor deposition zone via a liquid delivery apparatus including a vaporizer. A liquid precursor material is supplied to the liquid delivery apparatus for vaporization thereof to yield the vapor-phase metal precursor composition. The vapor-phase metal precursor composition is flowed to the chemical vapor deposition zone for deposition of metal on the substrate to form the metal-containing film. The liquid precursor material includes a metalorganic polyamine complex, the use of which permits the achievement of sustained operation of the liquid delivery chemical vapor deposition process between maintenance events, due to the low decomposition levels achieved in the vaporization of the polyamine-complexed precursor.
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Baum Thomas H.
Bhandari Gautam
Brown Duncan W.
Gardiner Robin A.
Kirlin Peter S.
Advanced Technology & Materials Inc.
Hultquist Steven J.
King Roy V.
Zitzmann Oliver A. M.
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