Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Compound semiconductor
Reexamination Certificate
2008-04-22
2008-04-22
Baumeister, B. William (Department: 2891)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Compound semiconductor
C438S046000, C977S932000
Reexamination Certificate
active
07361522
ABSTRACT:
A heterosystem of two different materials, mismatched in terms of lattice constant or symmetry, may be formed with reduced defects by using a two step approach proposed in this invention. Nanowires are first grown on a semiconductor substrate, and then a thin film of the disparate crystallographically inconsistent material is grown from the nanowires through a two dimensional growth mode. The nanowire material may better match crystallographically to both the substrate and the grown film, or is simply the same as the grown film.
REFERENCES:
patent: 6831017 (2004-12-01), Li et al.
patent: 2006/0091408 (2006-05-01), Kim et al.
Sakai et al. “A new method of reducing dislocation density in GaN layer grown on sapphire substrate by MOVPE,” Journal of Crystal Growth 2000.
Kuykendall et al., “Crystallographic Alignment of High-Density Gallium Nitride Nanowire Arrays”, Advanced Online Publication, 2004.
Sun Yuxia
Wang Yongqian J.
Baumeister B. William
Intel Corporation
Reames Matthew L.
Trop Pruner & Hu P.C.
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