Group III-V compound semiconductor and group III-V compound...

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Graded composition

Reexamination Certificate

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C257S079000, C257S615000, C257S190000, C257S191000, C257S613000, C257S631000, C257S189000, C257S200000, C372S043010

Reexamination Certificate

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06841409

ABSTRACT:
An AlGaInP layer is formed on a substrate made of GaAs, and an AlGaAs layer is formed on the AlGaInP layer via a buffer layer therebetween. The buffer layer has a thickness of about 1.1 nm and is made of AlGaInP whose Ga content is smaller than that of the AlGaInP layer. The buffer layer may alternatively be made of AlGaAs whose Al content is smaller than that of the AlGaAs layer.

REFERENCES:
patent: 5744829 (1998-04-01), Murasato et al.
patent: 6181721 (2001-01-01), Geels et al.
patent: 6449299 (2002-09-01), Sato

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